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Automatic spin peeling device Product List

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Leaf Automatic Spin Separation Device

The main body can accommodate two tanks for liquid supply or waste liquid (20L) internally.

This is a sheet-type automatic spin peeling device that sets the cassette in the loader, transports the substrate with a clean robot, and performs peeling treatment, rinsing, and spin drying.

  • Other semiconductor manufacturing equipment
  • Automatic spin peeling device

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